Ohmic contact between titanium and sputtered MoS 2 films achieved by forming-gas annealing

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2018-07, Vol.57 (7S2), p.7
Main Authors: Toyama, Mayato, Ohashi, Takumi, Matsuura, Kentaro, Shimizu, Jun’ichi, Muneta, Iriya, Kakushima, Kuniyuki, Tsutsui, Kazuo, Wakabayashi, Hitoshi
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.57.07MA04