Low-pressure N 2 microplasma treatment for substrate surface cleaning prior to GaN selective growth

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2018-08, Vol.57 (8), p.85501
Main Authors: Kusakabe, Yasuhiro, Sugiyama, Hayata, Takenaka, Shun, Suzuki, Yohei, Maruyama, Takahiro, Naritsuka, Shigeya, Shimizu, Kazuo
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.57.085501