SiC-based MIS gas sensor for high water vapor environments

In this work we will prove that SiC-based MIS capacitors can work in environments with extremely high concentrations of water vapor and still be sensitive to hydrogen, CO and hydrocarbons, making these devices suitable for monitoring the exhaust gases of hydrogen or hydrocarbons based fuel cells. Un...

Full description

Saved in:
Bibliographic Details
Published in:Sensors and actuators. B, Chemical Chemical, 2012-12, Vol.175, p.60-66
Main Authors: Casals, Olga, Becker, Thomas, Godignon, Philippe, Romano-Rodriguez, Albert
Format: Article
Language:English
Subjects:
Capacitors
Carbon monoxide
Detectors de gasos
Devices
Ethane
Ethene
ethylene
Fuel cell
Fuel cells
Gas detectors
Gas sensor
Hidrogen
Hydrocarbons
Hydrogen
Management information systems
Metal–insulator–semiconductor
monitoring
nitrogen
permissible exposure limit
Piles de combustible
SiC
Silicon carbide
Steam
Vapor
Water vapor
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:In this work we will prove that SiC-based MIS capacitors can work in environments with extremely high concentrations of water vapor and still be sensitive to hydrogen, CO and hydrocarbons, making these devices suitable for monitoring the exhaust gases of hydrogen or hydrocarbons based fuel cells. Under the harshest conditions (45% of water vapor by volume ratio to nitrogen), Pt/TaOx/SiO2/SiC MIS capacitors are able to detect the presence of 1ppm of hydrogen, 2ppm of CO, 100ppm of ethane or 20ppm of ethene, concentrations that are far below the legal permissible exposure limits.
ISSN:0925-4005
1873-3077
DOI:10.1016/j.snb.2011.12.032