A Large-Range and High-Sensitivity Fiber-Optic Fabry-Perot Pressure Sensor Based on a Membrane-Hole-Base Structure

In the field of in situ measurement of high-temperature pressure, fiber-optic Fabry-Perot pressure sensors have been extensively studied and applied in recent years thanks to their compact size and excellent anti-interference and anti-shock capabilities. However, such sensors have high technological...

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Bibliographic Details
Published in:Micromachines (Basel) 2024-01, Vol.15 (2), p.174
Main Authors: Duan, Bowen, Hai, Zhenyin, Guo, Maocheng, Zheng, Yongqiu, Chen, Jiamin, Bai, Jiandong, Su, Zhixuan, Liang, Rui, Zhu, Hongtian, Zhang, Qi, Xue, Chenyang
Format: Article
Language:English
Subjects:
Algorithms
Deformation
Demodulation
Equipment and supplies
Etching
Fabry-Perot interferometers
Fabry–Perot cavity
Fiber optics
fiber-optic sensors
Fourier transforms
high sensitivity
High temperature
high-temperature pressure measurement
In situ measurement
Laser beam cutting
Membranes
Optics
Pressure measurement
Pressure sensors
Protective coatings
Sapphire
Sensitivity enhancement
Sensors
Temperature
wide pressure range
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Summary:In the field of in situ measurement of high-temperature pressure, fiber-optic Fabry-Perot pressure sensors have been extensively studied and applied in recent years thanks to their compact size and excellent anti-interference and anti-shock capabilities. However, such sensors have high technological difficulty, limited pressure measurement range, and low sensitivity. This paper proposes a fiber-optic Fabry-Perot pressure sensor based on a membrane-hole-base structure. The sensitive core was fabricated by laser cutting technology and direct bonding technology of three-layer sapphire and develops a supporting large-cavity-length demodulation algorithm for the sensor's Fabry-Perot cavity. The sensor exhibits enhanced sensitivity, a simplified structure, convenient preparation procedures, as well as improved pressure resistance and anti-harsh environment capabilities, and has large-range pressure sensing capability of 0-10 MPa in the temperature range of 20-370 °C. The sensor sensitivity is 918.9 nm/MPa, the temperature coefficient is 0.0695 nm/(MPa∙°C), and the error over the full temperature range is better than 2.312%.
ISSN:2072-666X
2072-666X
DOI:10.3390/mi15020174