Solution Process-Based Thickness Engineering of InZnO Semiconductors for Oxide Thin-Film Transistors with High Performance and Stability

To fabricate oxide thin-film transistors (TFTs) with high performance and excellent stability, preparing high-quality semiconductor films in the channel bulk region and minimizing the defect states in the gate dielectric/channel interfaces and back-channel regions is necessary. However, even if an o...

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Bibliographic Details
Published in:Micromachines (Basel) 2024-01, Vol.15 (2), p.193
Main Authors: Zhang, Xuan, Cho, Sung-Woon
Format: Article
Language:English
Subjects:
Annealing
Backplanes
Chemical bonds
Design parameters
Dielectric films
Dielectrics
Engineering
high performance
high stability
Interface stability
Interfaces
Nitrates
oxide semiconductor
Semiconductor devices
Semiconductor materials
Semiconductors
solution process
Thickness
Thin film transistors
Thin films
thin-film transistor
Transistors
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Summary:To fabricate oxide thin-film transistors (TFTs) with high performance and excellent stability, preparing high-quality semiconductor films in the channel bulk region and minimizing the defect states in the gate dielectric/channel interfaces and back-channel regions is necessary. However, even if an oxide transistor is composed of the same semiconductor film, gate dielectric/channel interface, and back channel, its electrical performance and operational stability are significantly affected by the thickness of the oxide semiconductor. In this study, solution process-based nanometer-scale thickness engineering of InZnO semiconductors was easily performed via repeated solution coating and annealing. The thickness-controlled InZnO films were then applied as channel regions, which were fabricated with almost identical film quality, gate dielectric/channel interface, and back-channel conditions. However, excellent operational stability and electrical performance suitable for oxide TFT backplane was only achieved using an 8 nm thick InZnO film. In contrast, the ultrathin and thicker films exhibited electrical performances that were either very resistive (high positive and low on-current) or excessively conductive (high negative and high off-current). This investigation confirmed that the quality of semiconductor materials, solution process design, and structural parameters, including the dimensions of the channel layer, must be carefully designed to realize high-performance and high-stability oxide TFTs.
ISSN:2072-666X
2072-666X
DOI:10.3390/mi15020193