Fabrication of 2-D Capacitive Micromachined Ultrasonic Transducer (CMUT) Array through Silicon Wafer Bonding

• Published in: Micromachines (Basel) 2022-01, Vol.13 (1), p.99
• Main Authors: Wang, Ziyuan, He, Changde, Zhang, Wendong, Li, Yifan, Gao, Pengfei, Meng, Yanan, Zhang, Guojun, Yang, Yuhua, Wang, Renxin, Cui, Jiangong, Wang, Hongliang, Zhang, Binzhen, Ren, Yongfeng, Zhen, Guoyong, Jiao, Xinquan, Zhang, Sai
• Format: Article
• Language: English
• Subjects: Acoustic tests; Acoustics; Aluminum; Arrays; Atmospheric pressure; Bonding; broadband; CMUT array; Design; Electrodes; FEM; Frequencies; high-sensitivity; Medical diagnosis; Medical imaging; MEMS sensors; Micromachining; Nondestructive testing; Performance tests; Receiving; Silicon films; Silicon wafers; Software; Static friction; Technical services; Transducers; Ultrasonic imaging; Ultrasonic transducers
• ISSN: 2072-666X; 2072-666X
• DOI: 10.3390/mi13010099

Capacitive micromachined ultrasound transducers (CMUTs) have broad application prospects in medical imaging, flow monitoring, and nondestructive testing. CMUT arrays are limited by their fabrication process, which seriously restricts their further development and application. In this paper, a vacuum-sealed device for medical applications is introduced, which has the advantages of simple manufacturing process, no static friction, repeatability, and high reliability. The CMUT array suitable for medical imaging frequency band was fabricated by a silicon wafer bonding technology, and the adjacent array devices were isolated by an isolation slot, which was cut through the silicon film. The CMUT device fabricated following this process is a 4 × 16 array with a single element size of 1 mm × 1 mm. Device performance tests were conducted, where the center frequency of the transducer was 3.8 MHz, and the 6 dB fractional bandwidth was 110%. The static capacitance (29.4 pF) and center frequency (3.78 MHz) of each element of the array were tested, and the results revealed that the array has good consistency. Moreover, the transmitting and receiving performance of the transducer was evaluated by acoustic tests, and the receiving sensitivity was -211 dB @ 3 MHz, -213 dB @ 4 MHz. Finally, reflection imaging was performed using the array, which provides certain technical support for the research of two-dimensional CMUT arrays in the field of 3D ultrasound imaging.