Understanding the Role of Soft X-ray in Charging Solid-Film and Cellular Electrets

Solid-film electrets and cellular electrets are defined as promising insulating dielectric materials containing permanent electrostatic and polarizations. High-performance charging methods are critical for electret transducers. Unlike dielectric barrier discharge (DBD) charging, the soft X-ray charg...

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Bibliographic Details
Published in:Nanomaterials (Basel, Switzerland) Switzerland), 2022-11, Vol.12 (23), p.4143
Main Authors: Feng, Yue, Rao, Zehong, Song, Ki-Young, Tang, Xusong, Zhou, Zilong, Xiong, Ying
Format: Article
Language:English
Subjects:
cellular electret
charge density
Charging
Chemical vapor deposition
Current carriers
Dielectric barrier discharge
Dielectrics
electret
Electrets
Electric fields
Electric potential
High aspect ratio
Hot pressing
Irradiation
Microelectromechanical systems
Piezoelectricity
Polymers
Ray generators
Soft x rays
soft X-ray
Space charge
Surface charge
Transducers
Voltage
X ray irradiation
X-rays
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Summary:Solid-film electrets and cellular electrets are defined as promising insulating dielectric materials containing permanent electrostatic and polarizations. High-performance charging methods are critical for electret transducers. Unlike dielectric barrier discharge (DBD) charging, the soft X-ray charging method, with its strong penetration ability, has been widely used in electrets after packaging and has even been embedded in high-aspect-ratio structures (HARSs). However, the related charging model and the charging effect of the soft X-ray irradiation remain unclear. In this study, the charge carrier migration theory and the one-dimensional electrostatic model were employed to build the soft X-ray charging models. The influence of soft X-ray irradiation under deferent poling voltages was investigated theoretically and experimentally. The conducted space charge measurement based on a pulsed electro-acoustic (PEA) system with a soft X-ray generator revealed that soft X-ray charging can offer higher surface charge densities and piezoelectricity to cellular electrets under the critical poling voltage lower than twice the breakdown voltage.
ISSN:2079-4991
2079-4991
DOI:10.3390/nano12234143