Reliability Characteristics of Metal-Insulator-Semiconductor Capacitors with Low-Dielectric-Constant Materials

In this study, the reliability characteristics of metal-insulator-semiconductor (MIS) capacitor structures with low-dielectric-constant (low- ) materials have been investigated in terms of metal gate area and geometry and thickness of dielectric film effects. Two low- materials, dense and porous low...

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Bibliographic Details
Published in:Molecules (Basel, Switzerland) Switzerland), 2023-01, Vol.28 (3), p.1134
Main Authors: Cheng, Yi-Lung, Peng, Wei-Fan, Huang, Chi-Jia, Chen, Giin-Shan, Fang, Jau-Shiung
Format: Article
Language:English
Subjects:
breakdown
Capacitors
Comparative analysis
Dielectric breakdown
Dielectric films
Dielectrics
Electric fields
Electronic components industry
Forecasts and trends
Insulators
low-dielectric-constant
Metals
MIS (semiconductors)
Permittivity
porous film
Porous materials
Projection model
Random variables
reliability
Thickness
Thin films
time-dependence-dielectric-breakdown
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Summary:In this study, the reliability characteristics of metal-insulator-semiconductor (MIS) capacitor structures with low-dielectric-constant (low- ) materials have been investigated in terms of metal gate area and geometry and thickness of dielectric film effects. Two low- materials, dense and porous low- films, were used. Experimental results indicated that the porous low- films had shorter breakdown times, lower Weibull slope parameters and electric field acceleration factors, and weaker thickness-dependence breakdowns compared to the dense low- films. Additionally, a larger derivation in dielectric breakdown projection model and a single Weilbull plot of the breakdown time distributions from various areas merging was observed. This study also pointed out that the porous low- film in the irregular-shaped metal gate MIS capacitor had a larger dielectric breakdown time than that in the square- and circle-shaped samples, which violates the trend of the sustained electric field. As a result, another breakdown mechanism exists in the irregular-shaped sample, which is required to explore in the future work.
ISSN:1420-3049
1420-3049
DOI:10.3390/molecules28031134