A Study on the Characteristic and Antibacterial Activity of Ti3Ox Thin Films

A pure Ti target in Ar/O2 gas mixture was used to synthesize Ti3Ox thin film on a glass substrate by Reactive High-Power Impulse Magnetron Sputtering (HiPIMS) under different sputtering power (2 and 2.5 kW). The influence of HiPIMS parameters on thin films’ structural, morphological, chemical compos...

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Bibliographic Details
Published in:Catalysts 2021-11, Vol.11 (11), p.1416
Main Authors: Widyastuti, Endrika, Xu, Fu-Yang, Chiu, Chen-Tien, Jan, Jhen-Hau, Hsu, Jue-Liang, Lee, Ying-Chieh
Format: Article
Language:English
Subjects:
Annealing
Catalysts
Catalytic activity
Chemical composition
Chemical reactions
Chemical vapor deposition
E coli
Energy
Gas mixtures
Glass substrates
Light irradiation
Magnetron sputtering
Magnéli-phase
Methylene blue
Microstructure
Optical properties
Phase transitions
Photocatalysis
reactive-HiPIMS
S. aureus
Spectrum analysis
Synthesis
Thin films
Ti3O
Ti3O5
Titanium
Titanium dioxide
Titanium oxides
Ultraviolet radiation
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Summary:A pure Ti target in Ar/O2 gas mixture was used to synthesize Ti3Ox thin film on a glass substrate by Reactive High-Power Impulse Magnetron Sputtering (HiPIMS) under different sputtering power (2 and 2.5 kW). The influence of HiPIMS parameters on thin films’ structural, morphological, chemical composition, optical and photocatalytic, and antibacterial properties was investigated. In this study, Ti3Ox thin films can be synthesized using the HiPIMS method without the post-annealing process. Two co-existence phases (hexagonal Ti3O and base-centered monoclinic Ti3O5 phases) existed on the Ti3Ox films. It is found that the peak intensity of (006) Ti3O hexagonal slightly increased as the sputtering power increased from 2 to 2.5 kW. The Ti3Ox thin-film bandgap values were 3.36 and 3.50 eV for 2 and 2.5 kW, respectively. The Ti3Ox films deposited at 2.5 kW showed good photocatalytic activity under UV light irradiation, with a higher methylene blue dye degradation rate than TiO2 thin films. The antibacterial study on Ti3Ox thin films exhibited a high inhibition percentage against E. coli and S. aureus. This study demonstrates that Ti3Ox thin films can promote high photocatalytic and antibacterial activity.
ISSN:2073-4344
2073-4344
DOI:10.3390/catal11111416