Tipping solutions: emerging 3D nano-fabrication/ -imaging technologies

The evolution of optical microscopy from an imaging technique into a tool for materials modification and fabrication is now being repeated with other characterization techniques, including scanning electron microscopy (SEM), focused ion beam (FIB) milling/imaging, and atomic force microscopy (AFM)....

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Bibliographic Details
Published in:Nanophotonics (Berlin, Germany) Germany), 2017-09, Vol.6 (5), p.923-941
Main Authors: Seniutinas, Gediminas, Balčytis, Armandas, Reklaitis, Ignas, Chen, Feng, Davis, Jeffrey, David, Christian, Juodkazis, Saulius
Format: Article
Language:English
Subjects:
3D fabrication
81.07.-b
Atomic force microscopy
Devices
Fluidics
Imaging
Ion beams
nanofabrication
nanophotonics
nanoscale
Nanostructure
Nanotechnology
Optical microscopy
Photonics
Scanning electron microscopy
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Summary:The evolution of optical microscopy from an imaging technique into a tool for materials modification and fabrication is now being repeated with other characterization techniques, including scanning electron microscopy (SEM), focused ion beam (FIB) milling/imaging, and atomic force microscopy (AFM). Fabrication and imaging of materials undergoing a three-dimensional (3D) nano-structuring within a 1−100 nm resolution window is required for future manufacturing of devices. This level of precision is critically in enabling the cross-over between different device platforms (e.g. from electronics to micro-/nano-fluidics and/or photonics) within future devices that will be interfacing with biological and molecular systems in a 3D fashion. Prospective trends in electron, ion, and nano-tip based fabrication techniques are presented.
ISSN:2192-8614
2192-8606
2192-8614
DOI:10.1515/nanoph-2017-0008