Vertical serpentine interconnect-enabled stretchable and curved electronics

Stretchable and curved electronic devices are a promising technology trend due to their remarkable advantages. Many approaches have been developed to manufacture stretchable and curved electronics. Here, to allow such electronics to better serve practical applications, ranging from wearable devices...

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Bibliographic Details
Published in:Microsystems & nanoengineering 2023-11, Vol.9 (1), p.149-10, Article 149
Main Authors: Jiao, Rui, Wang, Ruoqin, Wang, Yixin, Cheung, Yik Kin, Chen, Xingru, Wang, Xiaoyi, Deng, Yang, Yu, Hongyu
Format: Article
Language:English
Subjects:
639/166/987
639/301/357/537
Automation
Design
Electronic equipment
Electronics
Engineering
Interconnect
Islands
Manufacturing
Manufacturing engineering
Mechanical properties
Robotics
Silicon wafers
Stress concentration
Stretchability
Technology
Transfer printing
Wearable technology
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Summary:Stretchable and curved electronic devices are a promising technology trend due to their remarkable advantages. Many approaches have been developed to manufacture stretchable and curved electronics. Here, to allow such electronics to better serve practical applications, ranging from wearable devices to soft robotics, we propose a novel vertical serpentine conductor (VSC) with superior electrical stability to interconnect functional devices through a silicon-based microfabrication process. Conformal vacuum transfer printing (CVTP) technology was developed to transfer the networked platform onto complex curved surfaces to demonstrate feasibility. The mechanical and electrical performance were investigated numerically and experimentally. The VSC interconnected network provides a new approach for stretchable and curved electronics with high stretchability and reliability.
ISSN:2055-7434
2096-1030
2055-7434
DOI:10.1038/s41378-023-00625-w