X-Ray Single-Grating Interferometry for Wavefront Measurement and Correction of Hard X-Ray Nanofocusing Mirrors

X-ray single-grating interferometry was applied to conduct accurate wavefront corrections for hard X-ray nanofocusing mirrors. Systematic errors in the interferometer, originating from a grating, a detector, and alignment errors of the components, were carefully examined. Based on the measured wavef...

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Bibliographic Details
Published in:Sensors (Basel, Switzerland) Switzerland), 2020-12, Vol.20 (24), p.7356
Main Authors: Yamada, Jumpei, Inoue, Takato, Nakamura, Nami, Kameshima, Takashi, Yamauchi, Kazuto, Matsuyama, Satoshi, Yabashi, Makina
Format: Article
Language:English
Subjects:
grating interferometer
Letter
wavefront correction
X-ray mirror
X-ray nanofocusing
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Summary:X-ray single-grating interferometry was applied to conduct accurate wavefront corrections for hard X-ray nanofocusing mirrors. Systematic errors in the interferometer, originating from a grating, a detector, and alignment errors of the components, were carefully examined. Based on the measured wavefront errors, the mirror shapes were directly corrected using a differential deposition technique. The corrected X-ray focusing mirrors with a numerical aperture of 0.01 attained two-dimensionally diffraction-limited performance. The results of the correction indicate that the uncertainty of the wavefront measurement was less than /72 in root-mean-square value.
ISSN:1424-8220
1424-8220
DOI:10.3390/s20247356