Thin film growth and mechanical properties of CrFeCoNi/TiNbZrTa multilayers

[Display omitted] •High entropy alloy-based CrFeCoNi/TiNbZrTa multilayer thin films grown by direct current (dc)-magnetron sputtering.•Multilayer structure analysis by X-ray diffraction and transmission electron microscopy.•Mechanical property characterization by nanoindentation and micropillar comp...

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Bibliographic Details
Published in:Materials & design 2022-12, Vol.224, p.111388, Article 111388
Main Authors: Rao, Smita G., Shu, Rui, Wang, Siyang, Boyd, Robert, Giuliani, Finn, le Febvrier, Arnaud, Eklund, Per
Format: Article
Language:English
Subjects:
Compression
High entropy alloy
Mechanical properties
Multilayers
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Summary:[Display omitted] •High entropy alloy-based CrFeCoNi/TiNbZrTa multilayer thin films grown by direct current (dc)-magnetron sputtering.•Multilayer structure analysis by X-ray diffraction and transmission electron microscopy.•Mechanical property characterization by nanoindentation and micropillar compression. Multilayers of high entropy alloys (HEA) are picking up interest due to the possibility of altering material properties by tuningcrystallinity, thickness, and interfaces of the layers. This study investigates the growth mechanism and mechanical properties of CrFeCoNi/TiNbZrTamultilayers grown by magnetron sputtering. Multilayers of bilayer thickness (Λ) from 5 nm to 50 nm were grown on Si(100) substrates. Images taken by transmission electron microscopy and energy-dispersive X-ray spectroscopy mapping revealed that the layers were well defined with no occurrence of elemental mixing. Multilayers with Λ 
ISSN:0264-1275
1873-4197
1873-4197
DOI:10.1016/j.matdes.2022.111388