A four-quadrant PVDF transducer for surface acoustic wave detection

In this paper, a polyvinylidene fluoride (PVDF) piezoelectric transducer was developed to detect laser-induced surface acoustic waves in a SiO(2)-thin film-Si-substrate structure. In order to solve the problems related to, firstly, the position of the probe, and secondly, the fact that signals at di...

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Bibliographic Details
Published in:Sensors (Basel, Switzerland) Switzerland), 2012-08, Vol.12 (8), p.10500-10510
Main Authors: Lu, Zimo, Dorantes-Gonzalez, Dante J, Chen, Kun, Yang, Fei, Jin, Baoyin, Li, Yanning, Chen, Zhi, Hu, Xiaotang
Format: Article
Language:English
Subjects:
Deviation
Error detection
Fluorides
four-quadrant arrangement
laser-induced surface acoustic wave
Lasers
Measurement techniques
Mechanical properties
Nondestructive testing
piezoelectric transducer
Piezoelectricity
Polyvinylidene fluorides
Propagation
PVDF transducer
Sensors
Silicon dioxide
Strain gauges
Surface acoustic waves
Thin films
Transducers
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Summary:In this paper, a polyvinylidene fluoride (PVDF) piezoelectric transducer was developed to detect laser-induced surface acoustic waves in a SiO(2)-thin film-Si-substrate structure. In order to solve the problems related to, firstly, the position of the probe, and secondly, the fact that signals at different points cannot be detected simultaneously during the detection process, a four-quadrant surface acoustic wave PVDF transducer was designed and constructed for the purpose of detecting surface acoustic waves excited by a pulse laser line source. The experimental results of the four-quadrant piezoelectric detection in comparison with the commercial nanoindentation technology were consistent, the relative error is 0.56%, and the system eliminates the piezoelectric surface wave detection direction deviation errors, improves the accuracy of the testing system by 1.30%, achieving the acquisition at the same time at different testing positions of the sample.
ISSN:1424-8220
1424-8220
DOI:10.3390/s120810500