Review of Electrothermal Micromirrors

Electrothermal micromirrors have become an important type of micromirrors due to their large angular scanning range and large linear motion. Typically, electrothermal micromirrors do not have a torsional bar, so they can easily generate linear motion. In this paper, electrothermal micromirrors based...

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Bibliographic Details
Published in:Micromachines (Basel) 2022-03, Vol.13 (3), p.429
Main Authors: Tang, Yue, Li, Jianhua, Xu, Lixin, Lee, Jeong-Bong, Xie, Huikai
Format: Article
Language:English
Subjects:
Actuation
Actuators
chevron microactuators
Cold
Contact angle
electrothermal microactuators
electrothermal micromirrors
MEMS
Pneumatics
Review
thermal bimorphs
thermo-pneumatic microactuators
Tip tilt
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Summary:Electrothermal micromirrors have become an important type of micromirrors due to their large angular scanning range and large linear motion. Typically, electrothermal micromirrors do not have a torsional bar, so they can easily generate linear motion. In this paper, electrothermal micromirrors based on different thermal actuators are reviewed, and also the mechanisms of those actuators are analyzed, including U-shape, chevron, thermo-pneumatic, thermo-capillary and thermal bimorph-based actuation. Special attention is given to bimorph based-electrothermal micromirrors due to their versatility in tip-tilt-piston motion. The exemplified applications of each type of electrothermal micromirrors are also presented. Moreover, electrothermal micromirrors integrated with electromagnetic or electrostatic actuators are introduced.
ISSN:2072-666X
2072-666X
DOI:10.3390/mi13030429