Si0.97Ge0.03 microelectronic thermoelectric generators with high power and voltage densities

Microelectronic thermoelectric generators are one potential solution to energizing energy autonomous electronics, such as internet-of-things sensors, that must carry their own power source. However, thermoelectric generators with the mm 2 footprint area necessary for on-chip integration made from hi...

Full description

Saved in:
Bibliographic Details
Published in:Nature communications 2020-08, Vol.11 (1), p.4362-4362, Article 4362
Main Authors: Dhawan, Ruchika, Madusanka, Prabuddha, Hu, Gangyi, Debord, Jeff, Tran, Toan, Maggio, Kenneth, Edwards, Hal, Lee, Mark
Format: Article
Language:English
Subjects:
639/166/987
639/4077/4072/4062
639/4077/4107
Activation
Electric power generation
Electronics
Generators
High voltage
High voltages
Humanities and Social Sciences
Integrated circuits
Microelectronics
multidisciplinary
Room temperature
Science
Science (multidisciplinary)
Temperature gradients
Temperature requirements
Thermoelectric generators
Thermoelectric materials
Voltage
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Microelectronic thermoelectric generators are one potential solution to energizing energy autonomous electronics, such as internet-of-things sensors, that must carry their own power source. However, thermoelectric generators with the mm 2 footprint area necessary for on-chip integration made from high thermoelectric figure-of-merit materials have been unable to produce the voltage and power levels required to run Si electronics using common temperature differences. We present microelectronic thermoelectric generators using Si 0.97 Ge 0.03 , made by standard Si processing, with high voltage and power generation densities that are comparable to or better than generators using high figure-of-merit materials. These Si-based thermoelectric generators have
ISSN:2041-1723
2041-1723
DOI:10.1038/s41467-020-18122-3