Study of temperature characteristics of micromachined suspended coplanar waveguides for biosensing applications

In the recent development on biosensors, coplanar waveguide based microwave dielectric sensors have been attracting more and more attentions. In this paper, microwave performance of a suspended coplanar waveguide subject to temperature variations, particularly in a small range, is studied. The proto...

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Bibliographic Details
Published in:Sensors (Basel, Switzerland) Switzerland), 2011-03, Vol.11 (3), p.2640-2651
Main Authors: Li, Lijie, Liu, Zhuming
Format: Article
Language:English
Subjects:
Biosensing Techniques - instrumentation
Biosensing Techniques - methods
Biosensors
Computer Simulation
coplanar waveguide
Design
Electric currents
Electricity
Equipment Design
Finite element analysis
Heat
Heaters
Microscopy, Electron, Scanning
Microtechnology - instrumentation
Microtechnology - methods
Microwaves
Models, Theoretical
Sensors
Silicon
Software
Temperature
temperature characteristics
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Summary:In the recent development on biosensors, coplanar waveguide based microwave dielectric sensors have been attracting more and more attentions. In this paper, microwave performance of a suspended coplanar waveguide subject to temperature variations, particularly in a small range, is studied. The prototype is realized through a MEMS fabrication foundry. The thermal transfer analysis of the device is conducted using finite element method, and the microwave properties of the device are characterized. One of the results shows that at 20 GHz, the S11 has decreased by 7.4%, and S21 has increased by 3.5% when the voltage applied to the heaters varies from 9 V to 29 V.
ISSN:1424-8220
1424-8220
DOI:10.3390/s110302640