Study of temperature characteristics of micromachined suspended coplanar waveguides for biosensing applications

In the recent development on biosensors, coplanar waveguide based microwave dielectric sensors have been attracting more and more attentions. In this paper, microwave performance of a suspended coplanar waveguide subject to temperature variations, particularly in a small range, is studied. The proto...

Full description

Saved in:
Bibliographic Details
Published in:Sensors (Basel, Switzerland) Switzerland), 2011-03, Vol.11 (3), p.2640-2651
Main Authors: Li, Lijie, Liu, Zhuming
Format: Article
Language:English
Subjects:
Biosensing Techniques - instrumentation
Biosensing Techniques - methods
Biosensors
Computer Simulation
coplanar waveguide
Design
Electric currents
Electricity
Equipment Design
Finite element analysis
Heat
Heaters
Microscopy, Electron, Scanning
Microtechnology - instrumentation
Microtechnology - methods
Microwaves
Models, Theoretical
Sensors
Silicon
Software
Temperature
temperature characteristics
Citations: Items that this one cites
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
cited_by
cites cdi_FETCH-LOGICAL-c462t-1a4545466184b910583d832d797aebe8d7a10ec8f11af81f1031f5b5898040913
container_end_page 2651
container_issue 3
container_start_page 2640
container_title Sensors (Basel, Switzerland)
container_volume 11
creator Li, Lijie
Liu, Zhuming
description In the recent development on biosensors, coplanar waveguide based microwave dielectric sensors have been attracting more and more attentions. In this paper, microwave performance of a suspended coplanar waveguide subject to temperature variations, particularly in a small range, is studied. The prototype is realized through a MEMS fabrication foundry. The thermal transfer analysis of the device is conducted using finite element method, and the microwave properties of the device are characterized. One of the results shows that at 20 GHz, the S11 has decreased by 7.4%, and S21 has increased by 3.5% when the voltage applied to the heaters varies from 9 V to 29 V.
doi_str_mv 10.3390/s110302640
format article
fullrecord <record><control><sourceid>proquest_doaj_</sourceid><recordid>TN_cdi_doaj_primary_oai_doaj_org_article_1c7391ef794a42e5ba038a94b66fd2e7</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><doaj_id>oai_doaj_org_article_1c7391ef794a42e5ba038a94b66fd2e7</doaj_id><sourcerecordid>3340025511</sourcerecordid><originalsourceid>FETCH-LOGICAL-c462t-1a4545466184b910583d832d797aebe8d7a10ec8f11af81f1031f5b5898040913</originalsourceid><addsrcrecordid>eNqNkk2LFDEQhhtR3HX14g-QBg-CMJrvTi6CLH4sLHhQz6E6qcxk6O60SffK_nszzrruepIcUqQeXlJvvU3znJI3nBvytlBKOGFKkAfNKRVMbDRj5OGd-qR5UsqeEMY514-bE8ao4p00p036uqz-uk2hXXCcMcOyZmzdDjK4BXMsS3Tl0B6jy2kEt4sT-rasZcbJ18qleYAJcvsTrnC7Ro-lDSm3fUwFpxKnbQvzPEQHS0xTedo8CjAUfHZznzXfP374dv55c_nl08X5-8uNE4otGwpC1qMU1aI3lEjNvebMd6YD7FH7DihBpwOlEDQN1QAaZC-10UQQQ_lZc3HU9Qn2ds5xhHxtE0T7-yHlrYVcZxvQUtdxQzF0RoBgKHsgXIMRvVLBM-yq1ruj1rz2I3qH05JhuCd6vzPFnd2mK8sZp9IcBF7dCOT0Y8Wy2DEWh0M1DtNarGGcEWUE-Q-ScCU105V8-Q-5T2ueqqeWyrpbojolK_X6SNXllZIx3P6aEnsIj_0bngq_uDvnLfonLfwXeOnAHA</addsrcrecordid><sourcetype>Open Website</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>1537506765</pqid></control><display><type>article</type><title>Study of temperature characteristics of micromachined suspended coplanar waveguides for biosensing applications</title><source>Open Access: PubMed Central</source><source>Publicly Available Content Database</source><creator>Li, Lijie ; Liu, Zhuming</creator><creatorcontrib>Li, Lijie ; Liu, Zhuming</creatorcontrib><description>In the recent development on biosensors, coplanar waveguide based microwave dielectric sensors have been attracting more and more attentions. In this paper, microwave performance of a suspended coplanar waveguide subject to temperature variations, particularly in a small range, is studied. The prototype is realized through a MEMS fabrication foundry. The thermal transfer analysis of the device is conducted using finite element method, and the microwave properties of the device are characterized. One of the results shows that at 20 GHz, the S11 has decreased by 7.4%, and S21 has increased by 3.5% when the voltage applied to the heaters varies from 9 V to 29 V.</description><identifier>ISSN: 1424-8220</identifier><identifier>EISSN: 1424-8220</identifier><identifier>DOI: 10.3390/s110302640</identifier><identifier>PMID: 22163759</identifier><language>eng</language><publisher>Switzerland: MDPI AG</publisher><subject>Biosensing Techniques - instrumentation ; Biosensing Techniques - methods ; Biosensors ; Computer Simulation ; coplanar waveguide ; Design ; Electric currents ; Electricity ; Equipment Design ; Finite element analysis ; Heat ; Heaters ; Microscopy, Electron, Scanning ; Microtechnology - instrumentation ; Microtechnology - methods ; Microwaves ; Models, Theoretical ; Sensors ; Silicon ; Software ; Temperature ; temperature characteristics</subject><ispartof>Sensors (Basel, Switzerland), 2011-03, Vol.11 (3), p.2640-2651</ispartof><rights>Copyright MDPI AG 2011</rights><rights>2011 by the authors; licensee MDPI, Basel, Switzerland. 2011</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c462t-1a4545466184b910583d832d797aebe8d7a10ec8f11af81f1031f5b5898040913</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://www.proquest.com/docview/1537506765/fulltextPDF?pq-origsite=primo$$EPDF$$P50$$Gproquest$$Hfree_for_read</linktopdf><linktohtml>$$Uhttps://www.proquest.com/docview/1537506765?pq-origsite=primo$$EHTML$$P50$$Gproquest$$Hfree_for_read</linktohtml><link.rule.ids>230,314,727,780,784,885,25753,27924,27925,37012,37013,44590,53791,53793,75126</link.rule.ids><backlink>$$Uhttps://www.ncbi.nlm.nih.gov/pubmed/22163759$$D View this record in MEDLINE/PubMed$$Hfree_for_read</backlink></links><search><creatorcontrib>Li, Lijie</creatorcontrib><creatorcontrib>Liu, Zhuming</creatorcontrib><title>Study of temperature characteristics of micromachined suspended coplanar waveguides for biosensing applications</title><title>Sensors (Basel, Switzerland)</title><addtitle>Sensors (Basel)</addtitle><description>In the recent development on biosensors, coplanar waveguide based microwave dielectric sensors have been attracting more and more attentions. In this paper, microwave performance of a suspended coplanar waveguide subject to temperature variations, particularly in a small range, is studied. The prototype is realized through a MEMS fabrication foundry. The thermal transfer analysis of the device is conducted using finite element method, and the microwave properties of the device are characterized. One of the results shows that at 20 GHz, the S11 has decreased by 7.4%, and S21 has increased by 3.5% when the voltage applied to the heaters varies from 9 V to 29 V.</description><subject>Biosensing Techniques - instrumentation</subject><subject>Biosensing Techniques - methods</subject><subject>Biosensors</subject><subject>Computer Simulation</subject><subject>coplanar waveguide</subject><subject>Design</subject><subject>Electric currents</subject><subject>Electricity</subject><subject>Equipment Design</subject><subject>Finite element analysis</subject><subject>Heat</subject><subject>Heaters</subject><subject>Microscopy, Electron, Scanning</subject><subject>Microtechnology - instrumentation</subject><subject>Microtechnology - methods</subject><subject>Microwaves</subject><subject>Models, Theoretical</subject><subject>Sensors</subject><subject>Silicon</subject><subject>Software</subject><subject>Temperature</subject><subject>temperature characteristics</subject><issn>1424-8220</issn><issn>1424-8220</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2011</creationdate><recordtype>article</recordtype><sourceid>PIMPY</sourceid><sourceid>DOA</sourceid><recordid>eNqNkk2LFDEQhhtR3HX14g-QBg-CMJrvTi6CLH4sLHhQz6E6qcxk6O60SffK_nszzrruepIcUqQeXlJvvU3znJI3nBvytlBKOGFKkAfNKRVMbDRj5OGd-qR5UsqeEMY514-bE8ao4p00p036uqz-uk2hXXCcMcOyZmzdDjK4BXMsS3Tl0B6jy2kEt4sT-rasZcbJ18qleYAJcvsTrnC7Ro-lDSm3fUwFpxKnbQvzPEQHS0xTedo8CjAUfHZznzXfP374dv55c_nl08X5-8uNE4otGwpC1qMU1aI3lEjNvebMd6YD7FH7DihBpwOlEDQN1QAaZC-10UQQQ_lZc3HU9Qn2ds5xhHxtE0T7-yHlrYVcZxvQUtdxQzF0RoBgKHsgXIMRvVLBM-yq1ruj1rz2I3qH05JhuCd6vzPFnd2mK8sZp9IcBF7dCOT0Y8Wy2DEWh0M1DtNarGGcEWUE-Q-ScCU105V8-Q-5T2ueqqeWyrpbojolK_X6SNXllZIx3P6aEnsIj_0bngq_uDvnLfonLfwXeOnAHA</recordid><startdate>20110301</startdate><enddate>20110301</enddate><creator>Li, Lijie</creator><creator>Liu, Zhuming</creator><general>MDPI AG</general><general>Molecular Diversity Preservation International (MDPI)</general><scope>CGR</scope><scope>CUY</scope><scope>CVF</scope><scope>ECM</scope><scope>EIF</scope><scope>NPM</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>3V.</scope><scope>7X7</scope><scope>7XB</scope><scope>88E</scope><scope>8FI</scope><scope>8FJ</scope><scope>8FK</scope><scope>ABUWG</scope><scope>AFKRA</scope><scope>AZQEC</scope><scope>BENPR</scope><scope>CCPQU</scope><scope>DWQXO</scope><scope>FYUFA</scope><scope>GHDGH</scope><scope>K9.</scope><scope>M0S</scope><scope>M1P</scope><scope>PIMPY</scope><scope>PQEST</scope><scope>PQQKQ</scope><scope>PQUKI</scope><scope>PRINS</scope><scope>7X8</scope><scope>7QO</scope><scope>8FD</scope><scope>FR3</scope><scope>P64</scope><scope>5PM</scope><scope>DOA</scope></search><sort><creationdate>20110301</creationdate><title>Study of temperature characteristics of micromachined suspended coplanar waveguides for biosensing applications</title><author>Li, Lijie ; Liu, Zhuming</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c462t-1a4545466184b910583d832d797aebe8d7a10ec8f11af81f1031f5b5898040913</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2011</creationdate><topic>Biosensing Techniques - instrumentation</topic><topic>Biosensing Techniques - methods</topic><topic>Biosensors</topic><topic>Computer Simulation</topic><topic>coplanar waveguide</topic><topic>Design</topic><topic>Electric currents</topic><topic>Electricity</topic><topic>Equipment Design</topic><topic>Finite element analysis</topic><topic>Heat</topic><topic>Heaters</topic><topic>Microscopy, Electron, Scanning</topic><topic>Microtechnology - instrumentation</topic><topic>Microtechnology - methods</topic><topic>Microwaves</topic><topic>Models, Theoretical</topic><topic>Sensors</topic><topic>Silicon</topic><topic>Software</topic><topic>Temperature</topic><topic>temperature characteristics</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Li, Lijie</creatorcontrib><creatorcontrib>Liu, Zhuming</creatorcontrib><collection>Medline</collection><collection>MEDLINE</collection><collection>MEDLINE (Ovid)</collection><collection>MEDLINE</collection><collection>MEDLINE</collection><collection>PubMed</collection><collection>CrossRef</collection><collection>ProQuest Central (Corporate)</collection><collection>Health &amp; Medical Collection</collection><collection>ProQuest Central (purchase pre-March 2016)</collection><collection>Medical Database (Alumni Edition)</collection><collection>Hospital Premium Collection</collection><collection>Hospital Premium Collection (Alumni Edition)</collection><collection>ProQuest Central (Alumni) (purchase pre-March 2016)</collection><collection>ProQuest Central (Alumni)</collection><collection>ProQuest Central</collection><collection>ProQuest Central Essentials</collection><collection>ProQuest Databases</collection><collection>ProQuest One Community College</collection><collection>ProQuest Central</collection><collection>Health Research Premium Collection</collection><collection>Health Research Premium Collection (Alumni)</collection><collection>ProQuest Health &amp; Medical Complete (Alumni)</collection><collection>Health &amp; Medical Collection (Alumni Edition)</collection><collection>PML(ProQuest Medical Library)</collection><collection>Publicly Available Content Database</collection><collection>ProQuest One Academic Eastern Edition (DO NOT USE)</collection><collection>ProQuest One Academic</collection><collection>ProQuest One Academic UKI Edition</collection><collection>ProQuest Central China</collection><collection>MEDLINE - Academic</collection><collection>Biotechnology Research Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Biotechnology and BioEngineering Abstracts</collection><collection>PubMed Central (Full Participant titles)</collection><collection>DOAJ Directory of Open Access Journals</collection><jtitle>Sensors (Basel, Switzerland)</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Li, Lijie</au><au>Liu, Zhuming</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Study of temperature characteristics of micromachined suspended coplanar waveguides for biosensing applications</atitle><jtitle>Sensors (Basel, Switzerland)</jtitle><addtitle>Sensors (Basel)</addtitle><date>2011-03-01</date><risdate>2011</risdate><volume>11</volume><issue>3</issue><spage>2640</spage><epage>2651</epage><pages>2640-2651</pages><issn>1424-8220</issn><eissn>1424-8220</eissn><abstract>In the recent development on biosensors, coplanar waveguide based microwave dielectric sensors have been attracting more and more attentions. In this paper, microwave performance of a suspended coplanar waveguide subject to temperature variations, particularly in a small range, is studied. The prototype is realized through a MEMS fabrication foundry. The thermal transfer analysis of the device is conducted using finite element method, and the microwave properties of the device are characterized. One of the results shows that at 20 GHz, the S11 has decreased by 7.4%, and S21 has increased by 3.5% when the voltage applied to the heaters varies from 9 V to 29 V.</abstract><cop>Switzerland</cop><pub>MDPI AG</pub><pmid>22163759</pmid><doi>10.3390/s110302640</doi><tpages>12</tpages><oa>free_for_read</oa></addata></record>
fulltext fulltext
identifier ISSN: 1424-8220
ispartof Sensors (Basel, Switzerland), 2011-03, Vol.11 (3), p.2640-2651
issn 1424-8220
1424-8220
language eng
recordid cdi_doaj_primary_oai_doaj_org_article_1c7391ef794a42e5ba038a94b66fd2e7
source Open Access: PubMed Central; Publicly Available Content Database
subjects Biosensing Techniques - instrumentation
Biosensing Techniques - methods
Biosensors
Computer Simulation
coplanar waveguide
Design
Electric currents
Electricity
Equipment Design
Finite element analysis
Heat
Heaters
Microscopy, Electron, Scanning
Microtechnology - instrumentation
Microtechnology - methods
Microwaves
Models, Theoretical
Sensors
Silicon
Software
Temperature
temperature characteristics
title Study of temperature characteristics of micromachined suspended coplanar waveguides for biosensing applications
url http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-01T22%3A28%3A43IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_doaj_&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Study%20of%20temperature%20characteristics%20of%20micromachined%20suspended%20coplanar%20waveguides%20for%20biosensing%20applications&rft.jtitle=Sensors%20(Basel,%20Switzerland)&rft.au=Li,%20Lijie&rft.date=2011-03-01&rft.volume=11&rft.issue=3&rft.spage=2640&rft.epage=2651&rft.pages=2640-2651&rft.issn=1424-8220&rft.eissn=1424-8220&rft_id=info:doi/10.3390/s110302640&rft_dat=%3Cproquest_doaj_%3E3340025511%3C/proquest_doaj_%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-c462t-1a4545466184b910583d832d797aebe8d7a10ec8f11af81f1031f5b5898040913%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_pqid=1537506765&rft_id=info:pmid/22163759&rfr_iscdi=true