Editorial for the Special Issue on SiC Based Miniaturized Devices

The MEMS devices are found in many of today's electronic devices and systems, from air-bag sensors in cars to smart phones, embedded systems, etc [...].

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Bibliographic Details
Published in:Micromachines (Basel) 2020-04, Vol.11 (4), p.405
Main Authors: Saddow, Stephen E, Alquier, Daniel, Wang, Jing, LaVia, Francesco, Fraga, Mariana
Format: Article
Language:English
Subjects:
Abrasive machining
Abrasives
Aluminum nitride
Chemical properties
Embedded systems
Magnetic properties
Magnetron sputtering
Mechanical properties
Morphology
n/a
Nanoindentation
R&D
Radiation detectors
Research & development
Residual stress
Room temperature
Silicon carbide
Silicon substrates
Single crystals
Thin films
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Description
Summary:The MEMS devices are found in many of today's electronic devices and systems, from air-bag sensors in cars to smart phones, embedded systems, etc [...].
ISSN:2072-666X
2072-666X
DOI:10.3390/mi11040405