Nonlinear Passive Observer for Motion Estimation in Multi-Axis Precision Motion Control

A nonlinear passive observer (NPO) for estimating the time-varying velocity vector of a multi-axis high-precision motion control stage is presented. The proposed nonlinear estimation strategy is developed based on a Lyapunov stability analysis, which proves that the NPO is stable. Three test cases a...

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Bibliographic Details
Published in:Machines (Basel) 2024-06, Vol.12 (6), p.376
Main Authors: Gutierrez, Hector, Li, Dengfeng
Format: Article
Language:English
Subjects:
Analysis
Axis movements
Closed loop systems
Design
Estimates
Estimation
Feedback
Kinematics
Lyapunov analysis
magnetic suspension stage
Motion control
Motion simulation
multi-axis precision motion control
Nonlinear control
nonlinear observer
passive observer
Semiconductor industry
Semiconductor production equipment
Stability analysis
Velocity
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Description
Summary:A nonlinear passive observer (NPO) for estimating the time-varying velocity vector of a multi-axis high-precision motion control stage is presented. The proposed nonlinear estimation strategy is developed based on a Lyapunov stability analysis, which proves that the NPO is stable. Three test cases are used to investigate the performance of the proposed observer. Experimental results are given to demonstrate the performance of the proposed NPO in accurately estimating time-varying velocity during alignment, reciprocating motion, and multi-axis motion in high-precision motion control applications.
ISSN:2075-1702
2075-1702
DOI:10.3390/machines12060376