Surface-Acoustic-Wave Sensor Design for Acceleration Measurement

We suggest a concept design of a SAW-based microaccelerometer with an original triangular-shaped console-type sensing element. Our design is particularly optimized to increase the robustness against positioning errors of the SAW resonators on the opposite sides of the console. We also describe the r...

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Bibliographic Details
Published in:Sensors (Basel, Switzerland) Switzerland), 2018-07, Vol.18 (7), p.2301
Main Authors: Shevchenko, Sergey, Kukaev, Alexander, Khivrich, Maria, Lukyanov, Dmitry
Format: Article
Language:English
Subjects:
Acceleration measurement
Accelerometers
Computer simulation
Design of experiments
Design optimization
interdigital transducer (IDT)
Kinematics
Manufacturing
microaccelerometer
Microelectromechanical systems
Navigation systems
Peer review
Propagation
quartz packaging
Sensors
Surface acoustic wave devices
Surface acoustic waves
surface acoustic waves (SAWs)
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Description
Summary:We suggest a concept design of a SAW-based microaccelerometer with an original triangular-shaped console-type sensing element. Our design is particularly optimized to increase the robustness against positioning errors of the SAW resonators on the opposite sides of the console. We also describe the results of computer simulations and laboratory tests that are in a perfect agreement with each other and present the sensitivity characteristics of a manufactured experimental design device.
ISSN:1424-8220
1424-8220
DOI:10.3390/s18072301