The Effect of Deposition Rate on Morphology and Structural Properties of Carbon-Nickel Composite Films

Carbon-nickel films were grown by radio frequency magnetron cosputtering on glass substrates. The films were deposited under different deposition times, from 50 to 600 sec, at room temperature. We noticed that up to 180 sec the sputtering occurs in more metal content mode and in greater than 180 sec...

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Published in:Advances in materials science and engineering 2013-01, Vol.2013 (2013), p.1-3
Main Authors: Elahi, Smohammad, Dalouji, Vali, Valedbagi, Shahoo
Format: Article
Language:English
Subjects:
Deposition
Glass
Materials science
Morphology
Nonmetals
Radio frequencies
Sputtering
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cited_by cdi_FETCH-LOGICAL-c459t-9ec9eee5f592f2c2775d90db029499a7c56f0b6a615765c86d71735719b198243
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description Carbon-nickel films were grown by radio frequency magnetron cosputtering on glass substrates. The films were deposited under different deposition times, from 50 to 600 sec, at room temperature. We noticed that up to 180 sec the sputtering occurs in more metal content mode and in greater than 180 sec it occurs in more nonmetal content mode. It is shown that the structural and morphological properties of carbon-nickel films were strongly influenced by this behavior.
doi_str_mv 10.1155/2013/506549
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source Publicly Available Content (ProQuest); Wiley Open Access
subjects Deposition
Glass
Materials science
Morphology
Nonmetals
Radio frequencies
Sputtering
title The Effect of Deposition Rate on Morphology and Structural Properties of Carbon-Nickel Composite Films
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