Preparation and characterization of DC sputtered molybdenum thin films

Molybdenum (Mo) thin films have been deposited on soda-lime glass substrates using a DC magnetron sputtering system. Their electrical resistivity, and their morphological, structural and adhesive properties have been examined with respect to the deposition power, deposition time and substrate temper...

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Bibliographic Details
Published in:Alexandria engineering journal 2011-03, Vol.50 (1), p.57-63
Main Authors: Kashyout, Abd El-Hady B., Soliman, Hesham M.A., Gabal, Hanaa Abou, Ibrahim, Poussy Aly, Fathy, Marwa
Format: Article
Language:English
Subjects:
DC sputtering
Mo thin films
Mono-crystalline
Nanomaterials
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Summary:Molybdenum (Mo) thin films have been deposited on soda-lime glass substrates using a DC magnetron sputtering system. Their electrical resistivity, and their morphological, structural and adhesive properties have been examined with respect to the deposition power, deposition time and substrate temperature. The electrical resistivity of the Mo films could be reduced by increasing any of the above parameters. Within the range of the investigated deposition parameters, the films showed a mono-crystalline nature with a preferred orientation along the (1 1 0) plane. The Mo films adhesion to the soda-lime glass could be improved by increasing the substrate temperature. At a deposition power of 200 W, deposition time of 20 min and substrate temperature of 450 °C, Mo thin film exhibiting mono-crystalline structure with thickness equal to 450 nm and electrical resistivity equal to 1.85 × 10 −4 Ω cm was obtained.
ISSN:1110-0168
DOI:10.1016/j.aej.2011.01.009