A Microfabricated Bandpass Filter with Coarse-Tuning and Fine-Tuning Ability Based on IPD Process and PCB Artwork

• Published in: Micromachines (Basel) 2022-01, Vol.13 (1), p.123
• Main Authors: Shen, Junzhe, Qiang, Tian, Gao, Minjia, Ma, Yangchuan, Liang, Junge, Jiang, Yanfeng
• Format: Article
• Language: English
• Subjects: asymmetrical spiral inductor; Asymmetry; bandpass filter; Bandpass filters; Circuit boards; Circuits; coarse-tuning; Design; Etching; fine-tuning; Gallium arsenide; Insertion loss; interleaved array capacitor; Oxidation; Plating; Printed circuits; Substrates
• ISSN: 2072-666X; 2072-666X
• DOI: 10.3390/mi13010123

In this paper, a bandpass filter (BPF) was developed utilizing GaAs-based integrated passive device technology which comprises an asymmetrical spiral inductor and an interleaved array capacitor, possessing two tuning modes: coarse-tuning and fine-tuning. By altering the number of layers and radius of the GaAs substrate metal spheres, capacitance variation from 0.071 to 0.106 pF for coarse-tuning, and of 0.0015 pF for fine-tuning, can be achieved. Five air bridges were employed in the asymmetrical spiral inductor to save space, contributing to a compact chip area of 0.015λ × 0.018λ . The BPF chip was installed on the printed circuit board artwork with Au bonding wire and attached to a die sink. Measured results demonstrate an insertion loss of 0.38 dB and a return loss of 21.5 dB at the center frequency of 2.147 GHz. Furthermore, under coarse-tuning mode, variation in the center frequency from 1.956 to 2.147 GHz and transmission zero frequency from 4.721 to 5.225 GHz can be achieved. Under fine-tuning mode, the minimum tuning value and the average tuning value of the proposed BPF can be accurate to 1.0 MHz and 4.7 MHz for the center frequency and 1.0 MHz and 12.8 MHz for the transmission zero frequency, respectively.