Temperature Compensation of the MEMS-Based Electrochemical Seismic Sensors

Electrochemical seismic sensors that employ liquid as their inertial masses have the advantages of high performances in the low-frequency domain and a large working inclination. However, the surrounding temperature changes have serious impacts on the sensitivities of the sensors, which makes them un...

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Bibliographic Details
Published in:Micromachines (Basel) 2021-04, Vol.12 (4), p.387
Main Authors: Xu, Chao, Wang, Junbo, Chen, Deyong, Chen, Jian, Qi, Wenjie, Liu, Bowen, Liang, Tian, She, Xu
Format: Article
Language:English
Subjects:
Alliances
Bandwidths
Chemical sensors
electrochemical seismic sensor
Electrodes
Electrolytes
Flow velocity
Laplace transforms
Mechanical systems
Membranes
MEMS
Microelectromechanical systems
Partial differential equations
Principles
Sensitivity
Sensors
Temperature compensation
Temperature effects
thermistor
Thermistors
Vibration
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Summary:Electrochemical seismic sensors that employ liquid as their inertial masses have the advantages of high performances in the low-frequency domain and a large working inclination. However, the surrounding temperature changes have serious impacts on the sensitivities of the sensors, which makes them unable to work as expected. This paper studied the temperature characteristics of electrochemical seismic sensors based on MEMS (micro-electro-mechanical systems), and analyzed the influences of the temperature effects on the open-loop and closed-loop amplitude-frequency curves. Most importantly, the temperature compensation circuits based on thermistors were developed, which effectively adjusted pole frequencies and sensitivity coefficients, and finally realized the real-time temperature compensation for both open-loop and closed-loop measurements for the first time. The results showed that in the temperature range of -10 °C ~ +40 °C, and with the 3 dB bandwidth range of 0.01 Hz ~ 40 Hz, the change of the maximum sensitivity was reduced from about 25 dB before temperature compensation to less than 2 dB after temperature compensation.
ISSN:2072-666X
2072-666X
DOI:10.3390/mi12040387