Heterogeneously Integrated InGaAs and Si Membrane Four-Color Photodetector Arrays

We report the design and fabrication of heterogeneously integrated silicon and InGaAs membrane photodetector arrays. Visible and near-infrared (NIR) detection can be achieved by transfer printing a silicon membrane on InGaAs substrate. Based on the penetration-depth-dependent absorption of different...

Full description

Saved in:
Bibliographic Details
Published in:IEEE photonics journal 2016-04, Vol.8 (2), p.1-7
Main Authors: Menon, Laxmy, Yang, Hongjun, Sang June Cho, Mikael, Solomon, Zhenqiang Ma, Reuterskiold-Hedlund, Carl, Hammar, Mattias, Weidong Zhou
Format: Article
Language:English
Subjects:
Fabrication
Heterogeneous
Image color analysis
imager
Indium gallium arsenide
Junctions
near-infrared (NIR)
photodetector arrays
Photodetectors
Silicon
Substrates
visible
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:We report the design and fabrication of heterogeneously integrated silicon and InGaAs membrane photodetector arrays. Visible and near-infrared (NIR) detection can be achieved by transfer printing a silicon membrane on InGaAs substrate. Based on the penetration-depth-dependent absorption of different wavelengths, filter-free visible color detection can be obtained via three-junction photocurrent measurement for silicon, and NIR can be detected by InGaAs. The measurements show good agreement with the optical behavior predicted by the design and simulation.
ISSN:1943-0655
1943-0647
DOI:10.1109/JPHOT.2016.2544545