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Improved Perovskite Solar Cell Performance by High Growth Rate Spatial Atomic Layer Deposited Titanium Oxide Compact Layer

In this study, titanium dioxide (TiO 2 ) films are prepared using spatial atomic layer deposition (sALD) as an additional compact layer of tin oxide (SnO 2 ) electronic transport layer-based perovskite solar cells. The experimental results show that the deposition of sALD TiO 2 films on the fluorine...

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Bibliographic Details
Published in:IEEE journal of the Electron Devices Society 2021, Vol.9, p.49-56
Main Authors: Hsu, Chia-Hsun, Chen, Ka-Te, Liang, Lu-Sheng, Gao, Peng, Ou, Sin-Liang, Wu, Wan-Yu, Huang, Pao-Hsun, Lien, Shui-Yang
Format: Article
Language:English
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Summary:In this study, titanium dioxide (TiO 2 ) films are prepared using spatial atomic layer deposition (sALD) as an additional compact layer of tin oxide (SnO 2 ) electronic transport layer-based perovskite solar cells. The experimental results show that the deposition of sALD TiO 2 films on the fluorine-doped tin oxide substrate improves the haze at mid-long wavelengths, compensating the optical loss caused by the absorption of the TiO 2 layer in short-wavelengths. Compared to conventional cells, the insertion of the sALD TiO 2 compact layer regardless the thickness shows significantly improved open-circuit voltage, indicating the enhanced hole blocking ability as evidenced by the reduced reverse saturation current. In addition, the change in TiO 2 thickness is found to have impacts on short-circuit current, fill factor and hysteresis of the devices. The optimal sALD TiO 2 thickness of 10 nm leads to the best cell conversion efficiency of 20.1%, approximately improved by 6% compared to that of the conventional cells. Compared to conventional ALD techniques and other methods, the sALD which does not require vacuum system has the pinhole-free, low-cost, very fast and simple processes, demonstrating the great potential of sALD films for applications in perovskite solar cells.
ISSN:2168-6734
2168-6734
DOI:10.1109/JEDS.2020.3039189