A Review on Coupled Bulk Acoustic Wave MEMS Resonators

With the introduction of the working principle of coupled resonators, the coupled bulk acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been attracting much attention. In this paper, coupled BAW MEMS resonators are discussed, including the coupling theory, the actuation and...

Full description

Saved in:
Bibliographic Details
Published in:Sensors (Basel, Switzerland) Switzerland), 2022-05, Vol.22 (10), p.3857
Main Authors: Wang, Linlin, Wang, Chen, Wang, Yuan, Quan, Aojie, Keshavarz, Masoumeh, Madeira, Bernardo Pereira, Zhang, Hemin, Wang, Chenxi, Kraft, Michael
Format: Article
Language:English
Subjects:
Acoustic coupling
Acoustic waves
bulk acoustic wave (BAW)
Comparative analysis
coupled resonators
Damping
Energy dissipation
Localization
Micro-Electro-Mechanical System (MEMS)
Microelectromechanical systems
Propagation
Resonators
Review
sensing theory
Sensors
Stiffness
Surface acoustic waves
transduction mechanism
Vibration mode
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:With the introduction of the working principle of coupled resonators, the coupled bulk acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been attracting much attention. In this paper, coupled BAW MEMS resonators are discussed, including the coupling theory, the actuation and sensing theory, the transduction mechanism, and the applications. BAW MEMS resonators normally exhibit two types of vibration modes: lateral (in-plane) modes and flexural (out-of-plane) modes. Compared to flexural modes, lateral modes exhibit a higher stiffness with a higher operating frequency, resulting in a lower internal loss. Also, the lateral mode has a higher Q factor, as the fluid damping imposes less influence on the in-plane motion. The coupled BAW MEMS resonators in these two vibration modes are investigated in this work and their applications for sensing, timing, and frequency reference are also presented.
ISSN:1424-8220
1424-8220
DOI:10.3390/s22103857