Flexible Thin-Film PZT Ultrasonic Transducers on Polyimide Substrates

We report flexible thin-film lead zirconate titanate (PZT)-based ultrasonic transducers on polyimide substrates. The transducers are bar resonators designed to operate in the width extension mode. The active elements are 1 µm thick PZT films that were crystallized on Si substrates at 700 °C and tran...

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Bibliographic Details
Published in:Sensors (Basel, Switzerland) Switzerland), 2021-02, Vol.21 (3), p.1014
Main Authors: Liu, Tianning, Dangi, Ajay, Kim, Jeong Nyeon, Kothapalli, Sri-Rajasekhar, Choi, Kyusun, Trolier-McKinstry, Susan, Jackson, Thomas
Format: Article
Language:English
Subjects:
Communication
flexible pMUT
flexible PZT
flexible transducer
PZT pMUT
solution-cast polyimide
thin-film transducer
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Summary:We report flexible thin-film lead zirconate titanate (PZT)-based ultrasonic transducers on polyimide substrates. The transducers are bar resonators designed to operate in the width extension mode. The active elements are 1 µm thick PZT films that were crystallized on Si substrates at 700 °C and transferred to 5 µm thick solution-cast polyimide via dissolution of an underlying release layer. Underwater pitch-catch testing between two neighboring 100 µm × 1000 µm elements showed a 0.2 mV signal at a 1.5 cm distance for a driving voltage of 5 V peak at 9.5 MHz. With the same excitation, a 33 kPa sound pressure output at a 6 mm distance and a 32% bandwidth at -6 dB were measured by hydrophone.
ISSN:1424-8220
1424-8220
DOI:10.3390/s21031014