Ultra-precision measurement and control of angle motion in piezo-based platforms using strain gauge sensors and a robust composite controller

The measurement and control strategy of a piezo-based platform by using strain gauge sensors (SGS) and a robust composite controller is investigated in this paper. First, the experimental setup is constructed by using a piezo-based platform, SGS sensors, an AD5435 platform and two voltage amplifiers...

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Bibliographic Details
Published in:Sensors (Basel, Switzerland) Switzerland), 2013-07, Vol.13 (7), p.9070-9084
Main Authors: Liu, Lei, Bai, Yu-Guang, Zhang, Da-Li, Wu, Zhi-Gang
Format: Article
Language:English
Subjects:
Accuracy
Algorithms
Bandwidths
Controllers
Equipment Design
Equipment Failure Analysis
Feedback
Lasers
Micro-Electrical-Mechanical Systems - instrumentation
Motion
piezo-based platform
robust composite control
Sensors
Space telescopes
Strain gauges
Transducers, Pressure
ultra-precision angle motion
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Summary:The measurement and control strategy of a piezo-based platform by using strain gauge sensors (SGS) and a robust composite controller is investigated in this paper. First, the experimental setup is constructed by using a piezo-based platform, SGS sensors, an AD5435 platform and two voltage amplifiers. Then, the measurement strategy to measure the tip/tilt angles accurately in the order of sub-μrad is presented. A comprehensive composite control strategy design to enhance the tracking accuracy with a novel driving principle is also proposed. Finally, an experiment is presented to validate the measurement and control strategy. The experimental results demonstrate that the proposed measurement and control strategy provides accurate angle motion with a root mean square (RMS) error of 0.21 μrad, which is approximately equal to the noise level.
ISSN:1424-8220
1424-8220
DOI:10.3390/s130709070