Correction: Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method

[This corrects the article DOI: 10.1038/s41378-023-00532-0.].

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Bibliographic Details
Published in:Microsystems & nanoengineering 2023-07, Vol.9 (1), p.98-98, Article 98
Main Authors: Hong, Hao, Wei, Jiangtao, Lei, Xin, Chen, Haiyun, Sarro, Pasqualina M., Zhang, Guoqi, Liu, Zewen
Format: Article
Language:English
Subjects:
639/925/350/1058
639/925/927/1058
Correction
Engineering
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Description
Summary:[This corrects the article DOI: 10.1038/s41378-023-00532-0.].
ISSN:2055-7434
2096-1030
2055-7434
DOI:10.1038/s41378-023-00564-6