Concepts and Key Technologies of Microelectromechanical Systems Resonators

In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanisms of MEMS resonators are described. By reviewing the existing representative results, the performance parameters and key technologies, such as quality factor, frequency accuracy, and temperature stabi...

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Bibliographic Details
Published in:Micromachines (Basel) 2022-12, Vol.13 (12), p.2195
Main Authors: Feng, Tianren, Yuan, Quan, Yu, Duli, Wu, Bo, Wang, Hui
Format: Article
Language:English
Subjects:
Acoustics
MEMS
Microelectromechanical systems
oscillator
resonator
Resonators
Review
Sensors
Silicon
Technical services
Vibration mode
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Summary:In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanisms of MEMS resonators are described. By reviewing the existing representative results, the performance parameters and key technologies, such as quality factor, frequency accuracy, and temperature stability of MEMS resonators, are summarized. Finally, the development status, existing challenges and future trend of MEMS resonators are summarized. As a typical research field of vibration engineering, MEMS resonators have shown great potential to replace quartz resonators in timing, frequency, and resonant sensor applications. However, because of the limitations of practical applications, there are still many aspects of the MEMS resonators that could be improved. This paper aims to provide scientific and technical support for the improvement of MEMS resonators in timing, frequency, and resonant sensor applications.
ISSN:2072-666X
2072-666X
DOI:10.3390/mi13122195