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Investigation of the properties of a 3-level broadband antireflective structure on silicon by THz time-domain spectroscopy

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Bibliographic Details
Main Authors: Tzibizov, I.A., Kropotov, G.I., Pavelyev, V.S., Tukmakov, K.N., Reshetnikov, A.S.
Format: Conference Proceeding
Language:English
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ISSN:2100-014X
2101-6275
2100-014X
DOI:10.1051/epjconf/201819506016