A humidity sensing organic-inorganic composite for environmental monitoring

In this paper, we present the effect of varying humidity levels on the electrical parameters and the multi frequency response of the electrical parameters of an organic-inorganic composite (PEPC+NiPc+Cu2O)-based humidity sensor. Silver thin films (thickness ~200 nm) were primarily deposited on plasm...

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Bibliographic Details
Published in:Sensors (Basel, Switzerland) Switzerland), 2013-03, Vol.13 (3), p.3615-3624
Main Authors: Ahmad, Zubair, Zafar, Qayyum, Sulaiman, Khaulah, Akram, Rizwan, Karimov, Khasan S
Format: Article
Language:English
Subjects:
composite film
Copper - chemistry
Electrodes
Environmental monitoring
Environmental Monitoring - instrumentation
Environmental Monitoring - methods
Glass substrates
Humans
Humidity
humidity sensor
Microscopy, Electron, Scanning
Molecular structure
Organometallic Compounds - chemistry
physical vapor deposition
scanning electron micrograph
Semiconductors
Sensors
Silver - chemistry
Thin films
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Summary:In this paper, we present the effect of varying humidity levels on the electrical parameters and the multi frequency response of the electrical parameters of an organic-inorganic composite (PEPC+NiPc+Cu2O)-based humidity sensor. Silver thin films (thickness ~200 nm) were primarily deposited on plasma cleaned glass substrates by the physical vapor deposition (PVD) technique. A pair of rectangular silver electrodes was formed by patterning silver film through standard optical lithography technique. An active layer of organic-inorganic composite for humidity sensing was later spun coated to cover the separation between the silver electrodes. The electrical characterization of the sensor was performed as a function of relative humidity levels and frequency of the AC input signal. The sensor showed reversible changes in its capacitance with variations in humidity level. The maximum sensitivity ~31.6 pF/%RH at 100 Hz in capacitive mode of operation has been attained. The aim of this study was to increase the sensitivity of the previously reported humidity sensors using PEPC and NiPc, which has been successfully achieved.
ISSN:1424-8220
1424-8220
DOI:10.3390/s130303615