Fabry-Perot Interferometer Used to Measure Very Low Static Pressure Measurements

This paper describes the use of an optical instrument, the Fabry-Perot interferometer, adapted to measure very low pressures. The interferometer consists of two high-reflectance flat mirrors placed one in front of another. In addition, a metallic chamber contains air or a gas. In one of the faces of...

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Bibliographic Details
Published in:Sensors (Basel, Switzerland) Switzerland), 2023-07, Vol.23 (14), p.6493
Main Authors: Calixto, Sergio, Zitzumbo, Roberto, Hernandez, Zacarías Malacara
Format: Article
Language:English
Subjects:
Communication
Curing
Fabry–Perot interferometer
Light
Measurement
Mirrors
Ophthalmology
Optical instruments
optical sensor
physical sensor
polydimethyl siloxane
pressure sensor
Rubber
sensor devices
Sensors
Silicon wafers
Silicones
Viscosity
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Summary:This paper describes the use of an optical instrument, the Fabry-Perot interferometer, adapted to measure very low pressures. The interferometer consists of two high-reflectance flat mirrors placed one in front of another. In addition, a metallic chamber contains air or a gas. In one of the faces of the chamber, a flexible thin silicone membrane is attached and, over it, one of the mirrors is glued. The other mirror rests in a fixed mechanical mounting. Light crosses both mirrors and, when it leaves them, forms an interference pattern consisting of concentric circular fringes. When the pressure is increased/decreased within the chamber, a displacement of the fringes is observed due to the movement of the glued mirror. By measuring the fringe displacement and knowing the pressure, a calibration plot can be made. Minimum pressure measurements of about tens of Pascals were achieved.
ISSN:1424-8220
1424-8220
DOI:10.3390/s23146493