Nanoantenna Structure with Mid-Infrared Plasmonic Niobium-Doped Titanium Oxide

Among conductive oxide materials, niobium doped titanium dioxide has recently emerged as a stimulating and promising contestant for numerous applications. With carrier concentration tunability, high thermal stability, mechanical and environmental robustness, this is a material-of-choice for infrared...

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Bibliographic Details
Published in:Micromachines (Basel) 2019-12, Vol.11 (1), p.23
Main Authors: Ngo, Hai Dang, Chen, Kai, Handegård, Ørjan S, Doan, Anh Tung, Ngo, Thien Duc, Dao, Thang Duy, Ikeda, Naoki, Ohi, Akihiko, Nabatame, Toshihide, Nagao, Tadaaki
Format: Article
Language:English
Subjects:
Antenna arrays
Antennas
Carrier density
Doppler effect
Electric fields
Electron beam lithography
Fourier transforms
Incident light
Indium tin oxides
Infrared absorption
Infrared spectroscopy
mid-infrared plasmonics
nanoantenna
Nanoantennas
Niobium
niobium-doped titanium oxide
Optical properties
Oxide coatings
Oxygen plasma
Plasma etching
Plasmonics
Red shift
Scanning electron microscopy
Simulation
Spectrum analysis
Thermal stability
Titanium
Titanium dioxide
Titanium oxides
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Summary:Among conductive oxide materials, niobium doped titanium dioxide has recently emerged as a stimulating and promising contestant for numerous applications. With carrier concentration tunability, high thermal stability, mechanical and environmental robustness, this is a material-of-choice for infrared plasmonics, which can substitute indium tin oxide (ITO). In this report, to illustrate great advantages of this material, we describe successful fabrication and characterization of niobium doped titanium oxide nanoantenna arrays aiming at surface-enhanced infrared absorption spectroscopy. The niobium doped titanium oxide film was deposited with co-sputtering method. Then the nanopatterned arrays were prepared by electron beam lithography combined with plasma etching and oxygen plasma ashing processes. The relative transmittance of the nanostrip and nanodisk antenna arrays was evaluated with Fourier transform infrared spectroscopy. Polarization dependence of surface plasmon resonances on incident light was examined confirming good agreements with calculations. Simulated spectra also present red-shift as length, width or diameter of the nanostructures increase, as predicted by classical antenna theory.
ISSN:2072-666X
2072-666X
DOI:10.3390/mi11010023