Octopus – Application test of a simple and effective tool for polishing slurry monitoring

In the digital age it has become a fundamental issue to monitor and control process parameters continuously and automatically. The monitoring of critical process parameters enables better quality at lower production costs and higher yields. In order to investigate the interactions between production...

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Bibliographic Details
Published in:EPJ Web of Conferences 2020, Vol.238, p.3004
Main Authors: Vogt, Christian, Faehnle, Oliver, Kochs, Patrick, Rascher, Rolf
Format: Article
Language:English
Subjects:
Measurement methods
Monitoring
Polishing
Process parameters
Production costs
Online Access:Get full text
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Summary:In the digital age it has become a fundamental issue to monitor and control process parameters continuously and automatically. The monitoring of critical process parameters enables better quality at lower production costs and higher yields. In order to investigate the interactions between production quality and polishing parameters, we have developed a solution for automatic and reliable measurement of critical parameters. With this paper we first document the resolution and accuracy of the system compared to manual measuring methods currently in use.
ISSN:2100-014X
2101-6275
2100-014X
DOI:10.1051/epjconf/202023803004