Fabrication of Tungsten Oxide Nanowalls through HFCVD for Improved Electrochemical Detection of Methylamine

• Published in: Micromachines (Basel) 2024-04, Vol.15 (4), p.441
• Main Authors: Imran, Mohammad, Kim, Eun-Bi, Kim, Tae-Geum, Ameen, Sadia, Akhtar, Mohammad Shaheer, Kwak, Dong-Heui
• Format: Article
• Language: English
• Subjects: Chemical sensors; Chemical vapor deposition; Crystal structure; Crystallography; cyclic voltammetry; Electric properties; Electrochemical analysis; electrochemical sensor; Electrodes; Electrons; Environmental impact; Film growth; Gases; Gasification; Grain size; HFCVD; Metal oxides; methylamine; Morphology; nanowalls; Organic chemicals; Personal care industry; Product development; Purification; Sensors; Silicon substrates; Silicon wafers; Spectrum analysis; Temperature; Thin films; Toiletries; Tungsten compounds; Tungsten oxides; Voltammetry; Water; Wire; WO3; X-rays
• ISSN: 2072-666X; 2072-666X
• DOI: 10.3390/mi15040441

In this study, well-defined tungsten oxide (WO ) nanowall (NW) thin films were synthesized via a controlled hot filament chemical vapor deposition (HFCVD) technique and applied for electrochemical detection of methylamine toxic substances. Herein, for the thin-film growth by HFCVD, the temperature of tungsten (W) wire was held constant at ~1450 °C and gasification was performed by heating of W wire using varied substrate temperatures ranging from 350 °C to 450 °C. At an optimized growth temperature of 400 °C, well-defined and extremely dense WO nanowall-like structures were developed on a Si substrate. Structural, crystallographic, and compositional characterizations confirmed that the deposited WO thin films possessed monoclinic crystal structures of high crystal quality. For electrochemical sensing applications, WO NW thin film was used as an electrode, and cyclic voltammetry (CV) and linear sweep voltammetry (LSV) were measured with a wide concentration range of 20 μM~1 mM of methylamine. The fabricated electrochemical sensor achieved a sensitivity of ~183.65 μA mM cm , a limit of detection (LOD) of ~20 μM and a quick response time of 10 s. Thus, the fabricated electrochemical sensor exhibited promising detection of methylamine with considerable stability and reproducibility.