A multi-fork z-axis quartz micromachined gyroscope

A novel multi-fork z-axis gyroscope is presented in this paper. Different from traditional quartz gyroscopes, the lateral electrodes of the sense beam can be arranged in simple patterns; as a result, the fabrication is simplified. High sensitivity is achieved by the multi-fork design. The working pr...

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Bibliographic Details
Published in:Sensors (Basel, Switzerland) Switzerland), 2013-09, Vol.13 (9), p.12482-12496
Main Authors: Feng, Lihui, Zhao, Ke, Sun, Yunan, Cui, Jianmin, Cui, Fang, Yang, Aiying
Format: Article
Language:English
Subjects:
Acceleration
Accelerometry - instrumentation
anisotropic etching
Computer-Aided Design
coriolis force
Electrodes
Equipment Design
Equipment Failure Analysis
Micro-Electrical-Mechanical Systems - instrumentation
Miniaturization
Models, Theoretical
multi-fork
Quartz
quartz micromachined gyroscope
Reproducibility of Results
Sensitivity and Specificity
Sensors
Transducers
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Description
Summary:A novel multi-fork z-axis gyroscope is presented in this paper. Different from traditional quartz gyroscopes, the lateral electrodes of the sense beam can be arranged in simple patterns; as a result, the fabrication is simplified. High sensitivity is achieved by the multi-fork design. The working principles are introduced, while the finite element method (FEM) is used to simulate the modal and sensitivity. A quartz fork is fabricated, and a prototype is assembled. Impedance testing shows that the drive frequency and sense frequency are similar to the simulations, and the quality factor is approximately 10,000 in air. The scale factor is measured to be 18.134 mV/(°/s) and the nonlinearity is 0.40% in a full-scale input range of ±250 °/s.
ISSN:1424-8220
1424-8220
DOI:10.3390/s130912482