A multi-fork z-axis quartz micromachined gyroscope

A novel multi-fork z-axis gyroscope is presented in this paper. Different from traditional quartz gyroscopes, the lateral electrodes of the sense beam can be arranged in simple patterns; as a result, the fabrication is simplified. High sensitivity is achieved by the multi-fork design. The working pr...

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Published in:Sensors (Basel, Switzerland) Switzerland), 2013-09, Vol.13 (9), p.12482-12496
Main Authors: Feng, Lihui, Zhao, Ke, Sun, Yunan, Cui, Jianmin, Cui, Fang, Yang, Aiying
Format: Article
Language:English
Subjects:
Acceleration
Accelerometry - instrumentation
anisotropic etching
Computer-Aided Design
coriolis force
Electrodes
Equipment Design
Equipment Failure Analysis
Micro-Electrical-Mechanical Systems - instrumentation
Miniaturization
Models, Theoretical
multi-fork
Quartz
quartz micromachined gyroscope
Reproducibility of Results
Sensitivity and Specificity
Sensors
Transducers
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cited_by cdi_FETCH-LOGICAL-c542t-3c32c4c01acc7a79903373ef2b2c4574a7eb6af8228ca9caae38892c06134e993
cites cdi_FETCH-LOGICAL-c542t-3c32c4c01acc7a79903373ef2b2c4574a7eb6af8228ca9caae38892c06134e993
container_end_page 12496
container_issue 9
container_start_page 12482
container_title Sensors (Basel, Switzerland)
container_volume 13
creator Feng, Lihui
Zhao, Ke
Sun, Yunan
Cui, Jianmin
Cui, Fang
Yang, Aiying
description A novel multi-fork z-axis gyroscope is presented in this paper. Different from traditional quartz gyroscopes, the lateral electrodes of the sense beam can be arranged in simple patterns; as a result, the fabrication is simplified. High sensitivity is achieved by the multi-fork design. The working principles are introduced, while the finite element method (FEM) is used to simulate the modal and sensitivity. A quartz fork is fabricated, and a prototype is assembled. Impedance testing shows that the drive frequency and sense frequency are similar to the simulations, and the quality factor is approximately 10,000 in air. The scale factor is measured to be 18.134 mV/(°/s) and the nonlinearity is 0.40% in a full-scale input range of ±250 °/s.
doi_str_mv 10.3390/s130912482
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subjects Acceleration
Accelerometry - instrumentation
anisotropic etching
Computer-Aided Design
coriolis force
Electrodes
Equipment Design
Equipment Failure Analysis
Micro-Electrical-Mechanical Systems - instrumentation
Miniaturization
Models, Theoretical
multi-fork
Quartz
quartz micromachined gyroscope
Reproducibility of Results
Sensitivity and Specificity
Sensors
Transducers
title A multi-fork z-axis quartz micromachined gyroscope
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