Weak Capacitance Detection Circuit of Micro-Hemispherical Gyroscope Based on Common-Mode Feedback Fusion Modulation and Demodulation

As an effective capacitance signal produced by a micro-hemisphere gyro is usually below the pF level, and the capacitance reading process is susceptible to parasitic capacitance and environmental noise, it is highly difficult to acquire an effective capacitance signal. Reducing and suppressing noise...

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Bibliographic Details
Published in:Micromachines (Basel) 2023-05, Vol.14 (6), p.1161
Main Authors: Zhang, Xiaoyang, Li, Pinghua, Zhuang, Xuye, Sheng, Yunlong, Liu, Jinghao, Gao, Zhongfeng, Yu, Zhiyu
Format: Article
Language:English
Subjects:
Accuracy
Amplification
Background noise
Capacitance
Circuit design
Circuits
common-mode feedback
Demodulation
Demodulators
Electric potential
Electrodes
Feedback
hemispherical resonant gyro
High gain
low noise
micro-capacitor detection
Noise control
Noise reduction
Parasitics (electronics)
Power supply
Side effects
Signal to noise ratio
Velocity
Voltage
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Summary:As an effective capacitance signal produced by a micro-hemisphere gyro is usually below the pF level, and the capacitance reading process is susceptible to parasitic capacitance and environmental noise, it is highly difficult to acquire an effective capacitance signal. Reducing and suppressing noise in the gyro capacitance detection circuit is a key means to improve the performance of detecting the weak capacitance generated by MEMS gyros. In this paper, we propose a novel capacitance detection circuit, where three different means are utilized to achieve noise reduction. Firstly, the input common-mode feedback is applied to the circuit to solve the input common-mode voltage drift caused by both parasitic capacitance and gain capacitance. Secondly, a low-noise, high-gain amplifier is used to reduce the equivalent input noise. Thirdly, the modulator-demodulator and filter are introduced to the proposed circuit to effectively mitigate the side effects of noise; thus, the accuracy of capacitance detection can be further improved. The experimental results show that with the input voltage of 6 V, the newly designed circuit produces an output dynamic range of 102 dB and the output voltage noise of 5.69 nV/√Hz, achieving a sensitivity of 12.53 V/pF.
ISSN:2072-666X
2072-666X
DOI:10.3390/mi14061161