Temperature-Decoupled Single-Crystal MgO Fiber-Optic Fabry-Perot Vibration Sensor Based on MEMS Technology for Harsh Environments

A high-temperature-resistance single-crystal magnesium oxide (MgO) extrinsic Fabry-Perot (FP) interferometer (EFPI) fiber-optic vibration sensor is proposed and experimentally demonstrated at 1000 °C. Due to the excellent thermal properties (melting point > 2800 °C) and optical properties (transm...

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Bibliographic Details
Published in:Micromachines (Basel) 2024-05, Vol.15 (5), p.616
Main Authors: Su, Chengxin, Jia, Pinggang, Zhao, Aihao, Tu, Jiacheng, Liu, Jia, Ren, Qianyu, Xiong, Jijun
Format: Article
Language:English
Subjects:
Accuracy
Aerospace engines
Chemical etching
Decoupling method
Equipment and supplies
Error analysis
Extrinsic Fabry-Perot interferometers
Fiber optics
fiber-optic
Gas turbine engines
Gas-turbines
High temperature
Laser etching
Magnesium oxide
Manufacturing
Measuring instruments
Melting points
Optical properties
Sensitivity
Sensors
Single crystals
single-crystal MgO
Superconductors (materials)
temperature decoupling
Thermal properties
Thermodynamic properties
Vibration measurement
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Summary:A high-temperature-resistance single-crystal magnesium oxide (MgO) extrinsic Fabry-Perot (FP) interferometer (EFPI) fiber-optic vibration sensor is proposed and experimentally demonstrated at 1000 °C. Due to the excellent thermal properties (melting point > 2800 °C) and optical properties (transmittance ≥ 90%), MgO is chosen as the ideal material to be placed in the high-temperature testing area. The combination of wet chemical etching and direct bonding is used to construct an all-MgO sensor head, which is favorable to reduce the temperature gradient inside the sensor structure and avoid sensor failure. A temperature decoupling method is proposed to eliminate the cross-sensitivity between temperature and vibration, improving the accuracy of vibration detection. The experimental results show that the sensor is stable at 20-1000 °C and 2-20 g, with a sensitivity of 0.0073 rad (20 °C). The maximum nonlinearity error of the vibration sensor measurement after temperature decoupling is 1.17%. The sensor with a high temperature resistance and outstanding dynamic performance has the potential for applications in testing aero-engines and gas turbine engines.
ISSN:2072-666X
2072-666X
DOI:10.3390/mi15050616