High-Tolerance Grating Couplers for Vertical Backside Coupling

To facilitate convenient packaging of photonic integrated circuits on a fiber tip, a silicon grating coupler designed for vertical backside coupling has been developed. In order to comply with foundry capabilities and streamline the fabrication processes, the grating coupler features a minimum featu...

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Bibliographic Details
Published in:Applied sciences 2024-12, Vol.14 (23), p.11015
Main Authors: Chen, Jui-Hung, Bouamra, Arthur D, Wu, Chia-Ling, Fiore, Andrea, Tseng, Shuo-Yen
Format: Article
Language:English
Subjects:
Design
Geometry
grating coupler
Light
optical fiber sensors
Optimization
photonic integrated circuits
Photonics
Semiconductors
Sensors
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Summary:To facilitate convenient packaging of photonic integrated circuits on a fiber tip, a silicon grating coupler designed for vertical backside coupling has been developed. In order to comply with foundry capabilities and streamline the fabrication processes, the grating coupler features a minimum feature size larger than 200 nm and a single-etched structure on silicon. By inverse design-based optimization, the vertical backside grating coupler achieves a coupling efficiency of nearly 40% (−3.97 dB), while showcasing high fabrication and misalignment tolerance.
ISSN:2076-3417
2076-3417
DOI:10.3390/app142311015