Preparation of a Vertical Graphene-Based Pressure Sensor Using PECVD at a Low Temperature

Flexible pressure sensors have received much attention due to their widespread potential applications in electronic skins, health monitoring, and human-machine interfaces. Graphene and its derivatives hold great promise for two-dimensional sensing materials, owing to their superior properties, such...

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Bibliographic Details
Published in:Micromachines (Basel) 2022-04, Vol.13 (5), p.681
Main Authors: Cao, Xin, Zhang, Kunpeng, Feng, Guang, Wang, Quan, Fu, Peihong, Li, Fengping
Format: Article
Language:English
Subjects:
Atmospheric pressure
Carbon
Chemical vapor deposition
Electric fields
Electrodes
flexible
Flexible structures
Free radicals
Graphene
Graphical user interface
High temperature
Low temperature
Mica
Plasma
Plasma enhanced chemical vapor deposition
Power consumption
Power supply
pressure
Pressure sensors
sensor
Sensors
Substrates
vertical graphene (VG)
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Summary:Flexible pressure sensors have received much attention due to their widespread potential applications in electronic skins, health monitoring, and human-machine interfaces. Graphene and its derivatives hold great promise for two-dimensional sensing materials, owing to their superior properties, such as atomically thin, transparent, and flexible structure. The high performance of most graphene-based pressure piezoresistive sensors relies excessively on the preparation of complex, post-growth transfer processes. However, the majority of dielectric substrates cannot hold in high temperatures, which can induce contamination and structural defects. Herein, a credibility strategy is reported for directly growing high-quality vertical graphene (VG) on a flexible and stretchable mica paper dielectric substrate with individual interdigital electrodes in plasma-enhanced chemical vapor deposition (PECVD), which assists in inducing electric field, resulting in a flexible, touchable pressure sensor with low power consumption and portability. Benefitting from its vertically directed graphene microstructure, the graphene-based sensor shows superior properties of high sensitivity (4.84 KPa ) and a maximum pressure range of 120 KPa, as well as strong stability (5000 cycles), which makes it possible to detect small pulse pressure and provide options for preparation of pressure sensors in the future.
ISSN:2072-666X
2072-666X
DOI:10.3390/mi13050681