Integrated arrays of air-dielectric graphene transistors as transparent active-matrix pressure sensors for wide pressure ranges

Integrated electronic circuitries with pressure sensors have been extensively researched as a key component for emerging electronics applications such as electronic skins and health-monitoring devices. Although existing pressure sensors display high sensitivities, they can only be used for specific...

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Bibliographic Details
Published in:Nature communications 2017-03, Vol.8 (1), p.14950-14950, Article 14950
Main Authors: Shin, Sung-Ho, Ji, Sangyoon, Choi, Seiho, Pyo, Kyoung-Hee, Wan An, Byeong, Park, Jihun, Kim, Joohee, Kim, Ju-Young, Lee, Ki-Suk, Kwon, Soon-Yong, Heo, Jaeyeong, Park, Byong-Guk, Park, Jang-Ung
Format: Article
Language:English
Subjects:
639/301/1005/1007
639/301/1005/1009
639/925/918/1052
Arrays
Electrodes
Graphene
Humanities and Social Sciences
Materials science
multidisciplinary
Science
Science (multidisciplinary)
Sensors
Transistors
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Summary:Integrated electronic circuitries with pressure sensors have been extensively researched as a key component for emerging electronics applications such as electronic skins and health-monitoring devices. Although existing pressure sensors display high sensitivities, they can only be used for specific purposes due to the narrow range of detectable pressure (under tens of kPa) and the difficulty of forming highly integrated arrays. However, it is essential to develop tactile pressure sensors with a wide pressure range in order to use them for diverse application areas including medical diagnosis, robotics or automotive electronics. Here we report an unconventional approach for fabricating fully integrated active-matrix arrays of pressure-sensitive graphene transistors with air-dielectric layers simply formed by folding two opposing panels. Furthermore, this realizes a wide tactile pressure sensing range from 250 Pa to ∼3 MPa. Additionally, fabrication of pressure sensor arrays and transparent pressure sensors are demonstrated, suggesting their substantial promise as next-generation electronics. Electronic skins and health monitoring devices rely on integrated tactile sensors, which often require tailored degrees of sensitivity in specific pressure ranges. Here, the authors fabricate a versatile matrix array of pressure-sensitive graphene transistors operating in the wide 250 Pa to 3 MPa pressure range.
ISSN:2041-1723
2041-1723
DOI:10.1038/ncomms14950