Synthesis and Characterization of Carbon Nitride Films for Micro Humidity Sensors

Nano-structured carbon nitride (CN ) films were synthesized by a reactive RFmagnetron sputtering system with a DC bias under various deposition conditions, and theirphysical and electrical properties were investigated with a view to using them for microhumidity sensors. The FTIR spectra of the depos...

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Bibliographic Details
Published in:Sensors (Basel, Switzerland) Switzerland), 2008-03, Vol.8 (3), p.1508-1518
Main Author: Lee, Sung Pil
Format: Article
Language:English
Subjects:
Carbon
carbon nitride film
Electrodes
Full Research Paper
Gases
Humidity
humidity sensors
Morphology
nano-structure
Nitrogen
Sensors
sputtering system
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Summary:Nano-structured carbon nitride (CN ) films were synthesized by a reactive RFmagnetron sputtering system with a DC bias under various deposition conditions, and theirphysical and electrical properties were investigated with a view to using them for microhumidity sensors. The FTIR spectra of the deposited films showed a C=N stretching bandin the range of 1600~1700 ㎝⁻1, depending on the amount of nitrogen incorporation. Thecarbon nitride films deposited on the Si substrate had a nano-structured surfacemorphology with a grain size of about 20 nm, and their deposition rate was 1.5 μm/hr. Thesynthesized films had a high electrical resistivity in the range of 10⁸ to 10⁸ ω·cm,depending on the deposition conditions. The micro humidity sensors showed a goodlinearity and low hysteresis between 5 ~ 95 %RH.
ISSN:1424-8220
1424-8220
DOI:10.3390/s8031508