Development of a Spatial Resolution-Enhanced Digital-Hologram Microscope With a Liquid Crystal Phase Modulator

We proposed a DHM system with improved spatial resolution compared with that of the polarized camera-based DHM system by employing a liquid crystal phase modulator (LCPM). The LCPM-based holographic interferometry optical system can reliably construct a four-step phase shifting scheme by changing th...

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Bibliographic Details
Published in:IEEE photonics journal 2024-12, Vol.16 (6), p.1-7
Main Authors: Shim, Ha-Mong, Lim, Ki-Dong, Park, Min-Kyu, Lee, Kwang-Hoon, Kim, Jin Hyeok, Lim, Sungjin, Joo, Kyung-Il
Format: Article
Language:English
Subjects:
Biomedical optical imaging
Cameras
Digital hologram microscope
four-step phase shifting DHM
Holographic interferometry
Holographic optical components
Holography
Interference
liquid crystal phase-modulator
Liquid crystals
Optical imaging
Optical polarization
Optical sensors
Phase modulation
Spatial resolution
spatial-resolution enhance DHM
Voltage measurement
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Summary:We proposed a DHM system with improved spatial resolution compared with that of the polarized camera-based DHM system by employing a liquid crystal phase modulator (LCPM). The LCPM-based holographic interferometry optical system can reliably construct a four-step phase shifting scheme by changing the applied voltage, thus eliminating the need for mechanical moving parts. The spatial resolution characteristics of the proposed DHM system were analyzed using the 1951 USAF resolution target. These characteristics showed a fourfold improvement over the polarized camera-based DHM system. Additionally, the 3D information capturing capability of the proposed DHM system was experimentally confirmed using a via-hole array sample produced through the semiconductor fabrication process.
ISSN:1943-0655
1943-0647
DOI:10.1109/JPHOT.2024.3481418