Development of Thin Film Fabrication Using Magnetron Sputtering

Due to their versatility, thin metal films are being used in many modern technologies, such as optoelectronics, microelectronics, catalysis, energy conversion and storage, sensors, actuators, and food packaging [...]

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Bibliographic Details
Published in:Metals (Basel ) 2023-05, Vol.13 (5), p.963
Main Author: Sasani Ghamsari, Morteza
Format: Article
Language:English
Subjects:
Conflicts of interest
Electrodes
Magnetron sputtering
Metallic films
Microelectromechanical systems
n/a
Nanomaterials
Nanostructured materials
Optics
Photovoltaic cells
Radiation
Sensors
Surface acoustic waves
Thin films
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Description
Summary:Due to their versatility, thin metal films are being used in many modern technologies, such as optoelectronics, microelectronics, catalysis, energy conversion and storage, sensors, actuators, and food packaging [...]
ISSN:2075-4701
2075-4701
DOI:10.3390/met13050963