6D planar magnetic levitation system - PIMag 6D

The paper describes the structure of a novel 6 DOF planar magnetic drive system with nanometer accuracy. Some details of the model based design are described and some performance and qualification results are given. A main advantage of the system is that it uses only six, i.e. the minimum number of...

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Bibliographic Details
Published in:Mechanical Engineering Journal 2016, Vol.3(1), pp.15-00111-15-00111
Main Authors: SCHAEFFEL, Christoph, KATZSCHMANN, Michael, MOHR, Hans-Ulrich, GLOESS, Rainer, RUDOLF, Christian, MOCK, Christopher, WALENDA, Carolin
Format: Article
Language:English
Subjects:
6 DOF nano positioning
Feed forward based on correction matrices
Halbach array
Magnetic levitation
Planar magnetic bearing system
Thermal management
Trajectory control
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Summary:The paper describes the structure of a novel 6 DOF planar magnetic drive system with nanometer accuracy. Some details of the model based design are described and some performance and qualification results are given. A main advantage of the system is that it uses only six, i.e. the minimum number of sensors and coils to control all six degrees of freedom what keeps the system simple and makes it very effective. Furthermore the measurement system and the actuators are completely located below the slider; hence the platform is freely accessible from above and does not need any wiring connection since only passive parts as permanent magnets and grid plates are placed in the moved part of the platform.
ISSN:2187-9745
2187-9745
DOI:10.1299/mej.15-00111