Heater Topology Influence on the Functional Characteristics of Thin-Film Gas Sensors Made by MEMS-Silicon Technology

The design of the heater plays a decisive role in the energy consumption, sensitivity, and speed of chemical sensors. The paper analyzes various options for the topology of meander-type platinum heaters in chemical sensors fabricated on thin dielectric membranes using MEMS-silicon technology. Compre...

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Bibliographic Details
Published in:Chemosensors 2023-08, Vol.11 (8), p.443
Main Authors: Gorokh, Gennady, Taratyn, Igor, Fiadosenka, Uladzimir, Reutskaya, Olga, Lozovenko, Andrei
Format: Article
Language:English
Subjects:
anodic alumina membrane
chemical sensor
Chemical sensors
Current voltage characteristics
Energy consumption
Gas mixtures
Gas sensors
Gas-detectors
Gases
Heat
Heat transfer
heater topology
Manufacturing
Membranes
MEMS-silicon technology
Metal oxides
Microelectromechanical systems
Power consumption
Production processes
Sensors
Silicon
Silicon nitride
Silicon wafers
Temperature
Thin films
Topology
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Summary:The design of the heater plays a decisive role in the energy consumption, sensitivity, and speed of chemical sensors. The paper analyzes various options for the topology of meander-type platinum heaters in chemical sensors fabricated on thin dielectric membranes using MEMS-silicon technology. Comprehensive studies of the heater’s current–voltage characteristics have been carried out, heating rates have been measured at various currents, experimental temperature characteristics for various meander topologies have been obtained, heater options have been determined, and optimal heat transfer processes are ensured at a low power consumption of about 20–25 mW. Sensors with an optimal heater topology based on a double dielectric membrane were fabricated according to the described technological process, and sensory responses to 0.5 vol.% CH4 and 0.2% C3H8 were studied. The obtained results showed good results and confirmed the need to choose the optimal heater topology when designing sensors for recording the given type of gas mixtures in a certain temperature range.
ISSN:2227-9040
2227-9040
DOI:10.3390/chemosensors11080443